Carbon Tetrafluoride Adsorption Activated Carbon（HGF）

CF₄ Adsorption Activated Carbon is a high-performance adsorbent specially engineered for the capture and recovery of carbon tetrafluoride (CF₄) in semiconductor and microelectronics manufacturing processes.

With its highly developed pore structure and optimized surface chemistry, this product enables efficient CF₄ removal from process exhaust gases, supporting gas recycling, emission reduction, and cost control.

Pellet Activated Carbon is widely used in:

– Semiconductor fabrication plants

– Microelectronics manufacturing

– Fluorinated gas treatment systems

– Industrial gas recovery units

Key Value: Improve environmental compliance while reducing raw gas consumption.

Why CF₄ Needs Specialized Adsorption

Carbon tetrafluoride (CF₄) is:

– Chemically stable and difficult to decompose

– A potent greenhouse gas (high GWP)

– Commonly used in plasma etching processes

Traditional treatment methods often fail to efficiently capture CF₄.Our activated carbon is designed with tailored pore distribution and surface modification, enabling enhanced adsorption efficiency for fluorinated gases.