tantalum sputtering targets

 

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Tantalum Sputtering Targets

Tantalum(Ta) is one of the rare, hard, blue gray, and highly corrosion-resistant refractory metals. The melting point of tantalum is 2980 ℃, and the density is 16.68g/cm³. Tantalum has a series of excellent properties, including high melting point, low vapor pressure, good cold working performance, high chemical stability, strong resistance to liquid metal corrosion, and large dielectric constant of surface oxide film. Tantalum targets are mainly used in semiconductor coating, optical coating, flat panel displays, optical information storage space industries, glass coating industries such as automotive and architectural glass, optical communication, etc.