Photoresist Thinner
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Thinner
Thinner is a chemical commonly used in semiconductor manufacturing to adjust the concentration and viscosity of photoresist to meet process requirements.
Description
Thinner is a chemical commonly used in semiconductor manufacturing to adjust the concentration and viscosity of photoresists to meet process requirements. The main components of photoresist diluent include organic solvents and additives. The photoresist is a polymer that is generally insoluble in water, so an organic solvent is needed as a medium to dilute the photoresist. Organic solvents can effectively disperse the photoresist, making it easy to coat on the substrate and easy to remove after exposure.
According to different resin systems and line width requirements, such as G (436nm) line, I (365nm) line, KrF (248nm) line, EUV (13.5nm) line, etc., our company has corresponding formulas, adding solubilizers, antireflective agents, surfactants, and antioxidants developed by our company, which have good performance.
